Master thesis – Spectroscopic ellipsometry of oxide and nitride thin-films grown by PECVD and PEALD (f/m/d)

Silicon Austria LabsVillach,Österreich Abschlussarbeit1 month ago

Spectroscopic ellipsometry (SE) is a non-contact, non-destructive and non-invasive optical technique for investigating optical properties (complex permittivity) of thin-films.The technique can be also used to characterize the thin-film composition, thin-film layer information, surface roughness, film thickness as well as crystalline nature and carrier concentration of thin-film materials. The objective of this thesis is to study SE in a wide-spectral range from UV to IR region of oxide and nitride thin-films grown by plasma-enhanced chemical vapor deposition (PECVD), plasma-enhanced atomic layer deposition (PEALD) and also sputtering.

In particular, the candidate will:

  • Perform SE measurement on oxide and nitride thin-films, data analysis.
  • Special focus on the interpretation of vibrational modes of chemical bonds of oxides, sub-oxides and nitrides grown by PECVD and PEALD with different thin-film growth conditions. 
  • Support and work with process engineers to correlate the results with the thin-film growth processes.
  • Work with process engineer to optimize optical properties of thin-films for photonic applications.
  • Scientific report, documentation, presentation and paper writing.


  • Master student in materials science, surface science, nanotechnology, applied physics, optics or similar fields.
  • Good teamwork and communication skills.
  • Experience with clean-room environment would be appreciated.
  • Experience with ellipsometry is a plus.


  • Start date: March 2021
  • Payment: € 1500 gross (38.5 Hours/Week).
  • Additional Benefits: free coffee/milk, € 4.- food allowance per working day in restaurants, homeoffice, no coretime...
  • State-of-the-art laboratories and equipment, including the opportunity to work in a cleanroom environment.
  • An international scientific environment and contacts with our industrial network.
  • Opportunity to work on a hot topic with industrial collaborations.

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